Monolithic 3D Integration of Single-Grain Si TFTs

Monolithic 3D Integration of Single-Grain Si TFTs

Mofrad, Mohammad Reza Tajari, Ishihara, Ryoichi, Derakhshandeh, Jaber, Baiano, Alessandro, van der Cingel, Johan, Beenakker, Cees
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Volume:
1066
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1066-A20-06
Date:
January, 2008
File:
PDF, 3.19 MB
english, 2008
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