Phosphorus Diffusion Gettering of Metallic Impurities in Silicon: Mechanisms beyond Segregation
Schröter, Wolfgang, Döller, A., Zozime, A., Kveder, Vitaly, Seibt, Michael, Spiecker, E.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.527
File:
PDF, 239 KB
english, 2004