Visible photoluminescence of Si clusters embedded in silicon nitride films by plasma-enhanced chemical vapor deposition
Ying Wang, Dezhen Shen, Yichun Liu, Jiying Zhang, Zhenzhong Zhang, Yinglin Liu, Youming Lu, Xiwu FanVolume:
27
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.physe.2004.12.004
File:
PDF, 275 KB
english, 2005