Studies on vacuum microelectronic pressure sensors based on...

Physica E: Low-dimensional Systems and Nanostructures 2006 Vol. 31; Iss. 1

Studies on vacuum microelectronic pressure sensors based on carbon nanotubes arrays

Kaiyou Qian, Ting Chen, Bingyong Yan, Yangkui Lin, Dong Xu, Zhuo Sun, Bingchu Cai
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Volume:
31
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.physe.2005.07.016
File:
PDF, 264 KB
english, 2006
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