Patterning of porous silicon by metal-assisted chemical...

Patterning of porous silicon by metal-assisted chemical etching under open circuit potential conditions

V. Kapaklis, A. Georgiopoulos, P. Poulopoulos, C. Politis
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Volume:
38
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.physe.2006.12.055
File:
PDF, 1.09 MB
english, 2007
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