![](/img/cover-not-exists.png)
Fabrication of 3D micro-cantilevers based on MBE-grown strained semiconductor layers
Hiuma Iwase, Hyonkwan Choi, Masashi Akabori, Toshi-kazu Suzuki, Syoji Yamada, Daisuke Yamamoto, Toshio AndoVolume:
40
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.physe.2007.11.016
File:
PDF, 378 KB
english, 2008