Novel Design and Fabrication of High Sensitivity MEMS...

Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging

Damghanian, Mitra, Majlis, Burhanuddin Yeop
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Volume:
74
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.74.239
Date:
June, 2009
File:
PDF, 376 KB
english, 2009
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