Study of the influence of NH3 flow rates on the structure...

Physica E: Low-dimensional Systems and Nanostructures 2008 Vol. 40; Iss. 10

Study of the influence of NH3 flow rates on the structure and photoluminescence of silicon-nitride films with silicon nanoparticles

A. López-Suárez, J. Fandiño, B.M. Monroy, G. Santana, J.C. Alonso
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Volume:
40
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.physe.2008.05.004
File:
PDF, 926 KB
english, 2008
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