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Wafer-scale transfer of nanoimprinted patterns into silicon substrates
G. Hubbard, S.J. Abbott, Q. Chen, D.W.E. Allsopp, W.N. Wang, C.R. Bowen, R. Stevens, A. Šatka, D. Haško, F. Uherek, J. KováčVolume:
41
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.physe.2008.08.014
File:
PDF, 1.04 MB
english, 2009