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[IEEE 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Taipei, Taiwan (2014.10.27-2014.10.31)] 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Ion beam nanofabrication for mass production of nanotweezers based on new composite functional material with shape memory
Koledov, V., Shavrov, V., von Gratowski, S., Jede, R., Irzhak, A., Shelyakov, A.Year:
2014
DOI:
10.1109/3M-NANO.2014.7057348
File:
PDF, 1.20 MB
2014