Investigation of capacitive humidity sensing behavior of...

Physica E: Low-dimensional Systems and Nanostructures 2009 Vol. 41; Iss. 4

Investigation of capacitive humidity sensing behavior of silicon nanowires

Huilin Li, Jian Zhang, BaiRui Tao, LiJuan Wan, WenLi Gong
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Volume:
41
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.physe.2008.10.016
File:
PDF, 654 KB
english, 2009
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