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Morphological and compositional effects of FIB nanopatterning of multilayer metal/semiconducting devices
A. Taurino, M. Catalano, M. Lomascolo, A. Persano, A. Convertino, L. CerriVolume:
41
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.physe.2008.12.001
File:
PDF, 671 KB
english, 2009