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Origins of Negative Fixed Charge in Wet Oxidation for SiC
Kamiya, Katsumasa, Ebihara, Yasuhio, Chokawa, Kenta, Kato, Shigenori, Shiraishi, KenjiVolume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.409
Date:
January, 2013
File:
PDF, 414 KB
english, 2013