Origins of Negative Fixed Charge in Wet Oxidation for SiC

Materials Science Forum 2013 / 1 Vol. 740-742

Origins of Negative Fixed Charge in Wet Oxidation for SiC

Kamiya, Katsumasa, Ebihara, Yasuhio, Chokawa, Kenta, Kato, Shigenori, Shiraishi, Kenji
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.409
Date:
January, 2013
File:
PDF, 414 KB
english, 2013
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