CMOS Compatible Fabrication Processes for the Digital...

IEEE Journal of the Electron Devices Society 2014 / 5 Vol. 2; Iss. 3

CMOS Compatible Fabrication Processes for the Digital Micromirror Device

Cuiling Gong,, Hogan, Tim
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Volume:
2
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2014.2309129
Date:
May, 2014
File:
PDF, 12.05 MB
english, 2014
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