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Fabrication process, experimental results, and application for an elemental level vertically intergrated circuit (ELVIC)
Enomoto, TadayoshiVolume:
1
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1986.0552
Date:
August, 1986
File:
PDF, 1.27 MB
english, 1986