Characterization of PbTiO3 thin films deposited on...

Journal of Materials Research 1995 / 2 Vol. 10; Iss. 2

Characterization of PbTiO3 thin films deposited on Pt/Ti/SiO2/Si substrates by ECR PECVD

Chung, Sung-Woong, Shin, Jung-Shik, Kim, Jae-Whan, No, Kwangsoo, Chun, Sung-Soon, Lee, Won-Jong
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Volume:
10
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1995.0447
Date:
February, 1995
File:
PDF, 643 KB
english, 1995
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