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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - In-Situ Probing of Atomic Layer Deposition Processes using Infrared and Near Infrared Spectroscopy
O'Mahony, Aileen, Povey, Ian M., Pemble, Martyn E.Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2980011
File:
PDF, 568 KB
english, 2008