Study on UV-LIGA Technology Fabrication of Micro Gear...

Applied Mechanics and Materials 2011 / 8 Vol. 86

Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device

Zhang, Li Yong, Wang, Chang Lu, Liu, Zhong Ming, Lu, Ming, Meng, Ling Xian, Zhang, Yuan Guo, Zhang, He Ping
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Volume:
86
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.86.273
Date:
August, 2011
File:
PDF, 1.28 MB
english, 2011
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