Simultaneous Phosphorus and Si Self-Diffusion in Extrinsic,...

MRS Proceedings 2004 / 1 Vol. 810

Simultaneous Phosphorus and Si Self-Diffusion in Extrinsic, Isotopically Controlled Silicon Heterostructures

Silvestri, Hughes H., Bracht, Hartmut A., Sharp, Ian D., Hansen, John, Nylandsted-Larsen, Arne, Haller, Eugene E.
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Volume:
810
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-810-C3.3
Date:
January, 2004
File:
PDF, 99 KB
english, 2004
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