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Potassium Periodate-Based Solutions for Minimizing Galvanic Corrosion at the Cu-Mn Interface and for Polishing the Associated Cu Interconnect Structures
Chockalingam, A. M., Lagudu, U. R. K., Babu, S. V.Volume:
2
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.026304jss
Date:
February, 2013
File:
PDF, 1.04 MB
english, 2013