Combinatorial thin film composition mapping using three dimensional deposition profiles
Suram, Santosh K., Zhou, Lan, Becerra-Stasiewicz, Natalie, Kan, Kevin, Jones, Ryan J. R., Kendrick, Brian M., Gregoire, John M.Volume:
86
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4914466
Date:
March, 2015
File:
PDF, 4.98 MB
english, 2015