Nano Manufacturing Using Fountain Pen Nano-Lithography with Active Membrane Pumping
Lee, Young Kwan, Lee, Jin Hyoung, Lee, Sung Kun, Lee, Sang Hwan, Kim, Youn Jea, Kim, Hun MoVolume:
326-328
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.326-328.425
File:
PDF, 446 KB
english, 2006