Characterization of Undoped and Nitrogen-Doped 4H-SiC Thin Films by CVD from Bis(trimethylsilylmethane) Precursor
Jeong, Jae Kyeong, Song, Ho Keun, Um, Myung Yoon, Na, Hoon Joo, Song, In Bok, Kim, Dae Hwan, Kim, Hyeong JoonVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1650839
File:
PDF, 632 KB
english, 2004