The Measurement of the Thickness of Thin SiC Layers on...

Materials Science Forum 1998 Vol. 264-268

The Measurement of the Thickness of Thin SiC Layers on Silicon

Cimalla, Volker, Scheiner, J., Ecke, Gernot, Friedrich, M., Goldhahn, R., Zahn, D.R.T., Pezoldt, Jörg
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.641
File:
PDF, 328 KB
1998
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