Investigation of Diamond Grit Size and Conditioning Force Effect on CMP Pads Topography
Sun, Ting, Borucki, Leonard, Zhuang, Yun, Philipossian, AraVolume:
991
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0991-C01-07
Date:
January, 2007
File:
PDF, 245 KB
english, 2007