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High-resolution and large-area nanoparticle arrays using EUV interference lithography
Karim, Waiz, Tschupp, Simon Andreas, Oezaslan, Mehtap, Schmidt, Thomas J., Gobrecht, Jens, van Bokhoven, Jeroen A., Ekinci, YasinVolume:
7
Year:
2015
Language:
english
Journal:
Nanoscale
DOI:
10.1039/C5NR00565E
File:
PDF, 1.46 MB
english, 2015