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Multi-Wafer VPE Growth and Characterization of SiC Epitaxial Layers
Nordby, Jr., H.D., O'Loughlin, Michael J., MacMillan, Mike F., Burk, Al A., Oliver, James D.Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.173
File:
PDF, 343 KB
2000