Large Surface Area of HMDS Plasma Polymerized Thin Film Used for Production of Miniaturized Structures
Silva, Lilian Marques, Lima, Roberto R., Fachini, E.R., Simões, E.W., Pecoraro, E., Silva, Maria Lucia PereiraVolume:
636-637
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.636-637.1065
Date:
January, 2010
File:
PDF, 1.19 MB
english, 2010