Precision-Limit Positioning of a Linear Motor Nano Drive...

Materials Science Forum 2006 Vol. 505-507

Precision-Limit Positioning of a Linear Motor Nano Drive System

Hsieh, Chen, Lin, Ji-Lung, Huang, Jen Chiou, Chen, Chih Hong
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Volume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.505-507.1243
File:
PDF, 574 KB
english, 2006
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