Chemical Effect on the Material Removal Rate in the CMP of Silicon Wafers
Wang, Yong Guang, Zhang, Liang Chi, Biddut, AltabulVolume:
126-128
Langue:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.126-128.511
Date:
August, 2010
Fichier:
PDF, 307 KB
english, 2010