Challenges and Solutions for Fabricating Isolation Trenches...

Advanced Materials Research 2011 / 5 Vol. 254

Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors

Agarwal, Rahul, Xie, Jin, Lau, Kia Hian, Sampath, Praveen Kumar, Ranganathan, Nagarajan, Singh, Janak, Tsai, Ming Lin Julius
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Volume:
254
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.254.1
Date:
May, 2011
File:
PDF, 5.12 MB
english, 2011
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