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Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors
Agarwal, Rahul, Xie, Jin, Lau, Kia Hian, Sampath, Praveen Kumar, Ranganathan, Nagarajan, Singh, Janak, Tsai, Ming Lin JuliusVolume:
254
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.254.1
Date:
May, 2011
File:
PDF, 5.12 MB
english, 2011