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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - VUV-Stimulated MO CVD Processes of Copper Layer Deposition
Igumenov, Igor K., Kuchumov, Boris M., Kozlova, Svetlana, Koretskaya, Tat'yana P., Trubin, Sergey V., Sokuev, Roman, Lyakh, Vladimir, Kruchinin, VladimirYear:
2009
Language:
english
DOI:
10.1149/1.3207695
File:
PDF, 713 KB
english, 2009