A Study on the Self-Stopping CMP Process for the...

MRS Proceedings 2004 / 1 Vol. 816

A Study on the Self-Stopping CMP Process for the Planarization of the High Step Height(@step height>1.5um) Pattern

Kim, Kwang-Bok, Lee, Hyo-Jin, Jang, Ki-Hoon, Ko, Joung-Duk, Kim, Kyung-Hyun, Hwang, In-Seac, Ko, Yong-Sun, Song, Chang-Lyong
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Volume:
816
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-816-K4.2
Date:
January, 2004
File:
PDF, 63 KB
english, 2004
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