Impact of Nitridation on Negative and Positive Charge...

Materials Science Forum 2009 Vol. 600-603

Impact of Nitridation on Negative and Positive Charge Buildup in SiC Gate Oxides

Rozen, John, Dhar, Sarit, Wang, San Wu, Afanas'ev, Valery V., Pantelides, Sokrates T., Williams, John R., Feldman, Leonard C.
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.803
File:
PDF, 343 KB
english, 2009
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