Nitrogen-Implanted Aluminum for Planarized Insulation

Nitrogen-Implanted Aluminum for Planarized Insulation

Herndon, Terry O.
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Volume:
138
Year:
1991
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2085377
File:
PDF, 1.09 MB
english, 1991
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