Strength Behaviour of Polysilicon Thin Film Flexure Hinge
Zhang, Yong Yu, Chen, Xiao Yang, Sha, LingVolume:
33-37
Year:
2008
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.33-37.545
File:
PDF, 400 KB
english, 2008