Gettering of Copper and Nickel in p/p+ Epitaxial Wafers

Journal of The Electrochemical Society 2000 Vol. 147; Iss. 7

Gettering of Copper and Nickel in p/p+ Epitaxial Wafers

Hoelzl, R., Huber, D., Range, K. -J., Fabry, L., Hage, J., Wahlich, R.
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393593
File:
PDF, 406 KB
english, 2000
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