Metalorganic chemical vapor deposition of very thin...

Journal of Materials Research 2001 / 12 Vol. 16; Iss. 12

Metalorganic chemical vapor deposition of very thin Pb(Zr,Ti)O3 thin films at low temperatures for high-density ferroelectric memory applications

Kim, Hye Ryoung, Jeong, Seehwa, Jeon, Chung Bae, Kwon, Oh Seong, Hwang, Cheol Seong, Han, Young Ki, Yang, Doo Young, Oh, Ki Young
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Volume:
16
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2001.0491
Date:
December, 2001
File:
PDF, 1.01 MB
english, 2001
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