Characterization and modeling of CMOS-compatible acoustical particle velocity sensors for applications requiring low supply voltages
Piotto, M., Butti, F., Zanetti, E., Di Pancrazio, A., Iannaccone, G., Bruschi, P.Volume:
229
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.03.018
Date:
June, 2015
File:
PDF, 2.40 MB
english, 2015