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Cathodoluminescence Depth Profiling of Ge-Implanted SiO2 Layers
Fitting, H.-J., Barfels, T., Schmidt, B., von Czarnowski, A.Volume:
78-79
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.78-79.119
File:
PDF, 471 KB
2001