Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth
Loreti, S., Santoni, A., Fryček, Rudolf, Menicucci, I., Minarini, C., Della Sala, D.Volume:
453-454
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.453-454.43
File:
PDF, 2.24 MB
english, 2004