Modeling and Control of Piezo-Actuated Nanopositioning...

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IEEE Transactions on Automation Science and Engineering 2014

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Gu, Guo-Ying, Zhu, Li-Min, Su, Chun-Yi, Ding, Han, Fatikow, Sergej
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Year:
2014
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/tase.2014.2352364
File:
PDF, 2.42 MB
english, 2014
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