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Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography
Lee, Wonyoung, Prinz, Fritz B.Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3158593
File:
PDF, 492 KB
english, 2009