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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - New Mechanisms for Ozone-Based ALD Growth of High-k Dielectrics via Nitrogen-Oxygen Species
Jung, Sung-Hoon, Raisanen, Petri, Givens, Michael, Shero, Eric, Delabie, A., Swerts, Johan, Van Elshocht, S., Willem Maes, JanYear:
2010
Language:
english
DOI:
10.1149/1.3485245
File:
PDF, 467 KB
english, 2010