The Process Optimization of Smart Nanostructured AlN Thin Films Sputtered by Pulsed DC
Hasheminiasari, Masood, Lin, JianliangVolume:
67
Language:
english
Journal:
JOM
DOI:
10.1007/s11837-015-1348-1
Date:
April, 2015
File:
PDF, 926 KB
english, 2015