Tribological, Thermal, and Wear Characteristics of Poly(phenylene sulfide) and Polyetheretherketone Retaining Rings in Interlayer Dielectric CMP
Wei, Xiaomin, Zhuang, Yun, Sampurno, Yasa, Sudargho, Fransisca, Wargo, Christopher, Borucki, Leonard, Philipossian, AraVolume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3483752
File:
PDF, 860 KB
english, 2010