Tribological, Thermal, and Wear Characteristics of...

Tribological, Thermal, and Wear Characteristics of Poly(phenylene sulfide) and Polyetheretherketone Retaining Rings in Interlayer Dielectric CMP

Wei, Xiaomin, Zhuang, Yun, Sampurno, Yasa, Sudargho, Fransisca, Wargo, Christopher, Borucki, Leonard, Philipossian, Ara
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3483752
File:
PDF, 860 KB
english, 2010
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