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Simulation Studies on Giant Step Bunching in 4H-SiC Epitaxial Growth: Cluster Effect
Ishida, Yuuki, Yoshida, SadafumiVolume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.183
Date:
February, 2014
File:
PDF, 987 KB
english, 2014