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Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures
Yoshikawa, Masahito, Kojima, Kazutoshi, Ohshima, Takeshi, Itoh, Hisayoshi, Okada, Sohei, Ishida, YuukiVolume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1129
File:
PDF, 362 KB
2000