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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Influence of Temperature on Boron Concentration in SiGe-B Epitaxy
Zhou, Yiyang, Reindhardt, James A., Martin, Glen E., Dominguez, Selene D., Carey, Raymond D.Volume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355812
File:
PDF, 126 KB
english, 2006