Surface Microroughness of Silicon in Wet Process and its...

Solid State Phenomena 2008 Vol. 134

Surface Microroughness of Silicon in Wet Process and its Minimization

Morinaga, Hitoshi, Shimaoka, Kenji, Ohmi, Tadahiro
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Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.45
File:
PDF, 448 KB
english, 2008
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